A method for improving the positioning accuracy of a manipulator, such as a multiaxial or multiaxle industrial robot is proposed, by producing at least one absolutely accurate model of the manipulator for the control thereof. According to the invention, for producing the absolutely accurate model, firstly a pose of the manipulator is determined by an external measuring system, then deviations of the determined pose from a preset pose are detected, after which, as a function of the external measuring system and for minimizing deviations, the manipulator is moved into an end pose substantially corresponding to the preset pose and finally internal position values of the manipulator in the end pose are used for parametrizing the absolutely accurate model. In this way the invention improves the absolutely accurate measurement of robots, particularly with regards to accuracy and thus permits the replacement of a random, absolutely accurate robot in a working cell by another such robot.

 
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> Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position

> Robot arm mechanism

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