Resistive cross-point memory devices are provided, along with methods of
manufacture and use. The memory devices are comprised by an active layer of resistive
memory material interposed between upper electrodes and lower electrodes. A bit
region located within the resistive memory material at the cross-point of an upper
electrode and a lower electrode has a resistivity that can change through a range
of values in response to application of one, or more, voltage pulses. Voltage pulses
may be used to increase the resistivity of the bit region, decrease the resistivity
of the bit region, or determine the resistivity of the bit region. A diode is formed
between at the interface between the resistive memory material and the lower electrodes,
which may be formed as doped regions, isolated from each other by shallow trench
isolation. The resistive cross-point memory device is formed by doping lines, which
are separated from each other by shallow trench isolation, within a substrate one
polarity, and then doping regions of the lines the opposite polarity to form diodes.
Bottom electrodes are then formed over the diodes with a layer of resistive memory
material overlying the bottom electrodes. Top electrodes may then be added at an
angled to form a cross-point array defined by the lines and the top electrodes.