A piezoelectric element includes a first electrode layer 14 provided on
a substrate 11 and made of a noble metal to which at least one additive
selected from the group consisting of Mg, Ca, Sr, Ba, Al and oxides thereof is
added, an orientation control layer 15 provided on the first electrode layer
14 and made of a cubic or tetragonal perovskite oxide that is preferentially
oriented along a (100) or (001) plane, and a piezoelectric layer 16 provided
on the orientation control layer 15 and made of a rhombohedral or tetragonal
perovskite oxide that is preferentially oriented along a (001) plane.