A process for fabricating a vertical spiral inductor within a multichip module
package is disclosed. The process consists of depositing a pattern of bottom lines
by electroplating copper on a substrate and then depositing an insulation pattern.
Next, depositing a pattern of permeable material to form a core and then depositing
polyimide to define vias and permeable core insulation. The vias are filled by
electroplating copper. The vertical spiral inductor is formed and defined by next
depositing a pattern of top metal (e.g. copper) lines by electroplating wherein
the top metal lines are staggered with respect to the bottom metal lines. Lastly
a top protective layer is deposited. The core is made from a permeable or non-permeable material.