A process to produce mixed metal oxides and metal oxide compounds. The process includes evaporating a feed solution that contains at least two metal salts to form an intermediate. The evaporation is conducted at a temperature above the boiling point of the feed solution but below the temperature where there is significant crystal growth or below the calcination temperature of the intermediate. The intermediate is calcined, optionally in the presence of an oxidizing agent, to form the desired oxides. The calcined material can be milled and dispersed to yield individual particles of controllable size and narrow size distribution.