A method of manufacturing improved thin-film solar cells entirely by sputtering
includes a high efficiency back contact/reflecting multi-layer containing at least
one barrier layer consisting of a transition metal nitride. A copper indium gallium
diselenide (Cu(InXGa1-X)Se2) absorber layer (X
ranging from 1 to approximately 0.7) is co-sputtered from specially prepared electrically
conductive targets using dual cylindrical rotary magnetron technology. The band
gap of the absorber layer can be graded by varying the gallium content, and by
replacing the gallium partially or totally with aluminum. Alternately the absorber
layer is reactively sputtered from metal alloy targets in the presence of hydrogen
selenide gas. RF sputtering is used to deposit a non-cadmium containing window
layer of ZnS. The top transparent electrode is reactively sputtered aluminum doped
ZnO. A unique modular vacuum roll-to-roll sputtering machine is described. The
machine is adapted to incorporate dual cylindrical rotary magnetron technology
to manufacture the improved solar cell material in a single pass.