A ferroelectric memory includes read-write memory cells having a comparatively
weak imprint characteristic and read-only memory cells having a comparatively strong
imprint characteristic. Data written in the read-only memory cells are imprinted
by, for example, writing the same data repeatedly, after which the imprinted data
cannot be altered at the normal read-write voltage. The memory can be fabricated
by forming a first base layer and a second base layer having different chemical
compositions, and forming ferroelectric capacitors on the different base layers.
The first and second base layers may serve as adhesion layers promoting adhesion
between lower electrodes of the ferroelectric capacitors and an underlying insulation
layer. The ferroelectric capacitors may include a ferroelectric film having a constituent
metallic element present in the second base film but not in the first base film.