Passive end-effectors for handling microelectronic workpieces having a perimeter
edge circumscribing a first diameter. In one embodiment, a passive end-effector
in accordance with the invention includes a body having a plurality of contact
sites located along a circle corresponding to the first diameter of the workpiece.
The body, for example, can be a paddle or a fork. The passive end-effector can
also include a plurality of passive abutments that are carried by the body. The
abutments are located along the circle, and the abutments are configured to support
the workpiece in a plane spaced apart from the body. The abutments, for example,
can each include an inclined surface that slopes downwardly toward a central region
of the circle to support only the edge of the workpiece in a manner that suspends
or otherwise spaces the workpiece in a plane that is spaced apart from the body.
The passive end-effector can further include a sensor assembly that is carried
by the body. The sensor includes an engagement member positioned at least partially
within the circle, and the engagement member is configured to move generally transverse
to the plane as the workpiece is loaded on and unloaded from the end-effector.
The passive end-effector does not include an active member that exerts a force
against the edge of the workpiece parallel to the plane of the workpiece.