Definition of a phase shifting layout from an original layout can be time
consuming. If the original layout is divided into useful groups, i.e. clusters
that can be independently processed, then the phase shifting process can be performed
more rapidly. If the shapes on the layout are enlarged, then the overlapping shapes
can be grouped together to identify shapes that should be processed together. For
large layouts, growing and grouping the shapes can be time consuming. Therefore,
an approach that uses bins can speed up the clustering process, thereby allowing
the phase shifting to be performed in parallel on multiple computers. Additional
efficiencies result if identical clusters are identified and processing time saved
so that repeated clusters of shapes only undergo the computationally expensive
phase shifter placement and assignment process a single time.