An optoelectronic integrated circuit comprises a substrate, a multilayer structure
formed on the substrate, and an array of thyristor devices and corresponding resonant
cavities formed in the multilayer structure. The resonant cavities, which are adapted
to process different wavelengths of light, are formed by selectively removing portions
of said multilayer structure to provide said resonant cavities with different vertical
dimensions that correspond to the different wavelengths. Preferably, that portion
of the multilayer structure that is selectively removed to provide the multiple
wavelengths includes a periodic substructure formed by repeating pairs of an undoped
spacer layer and an undoped etch stop layer. The multilayer structure may be formed
from group III-V materials. In this case, the undoped spacer layer and undoped
etch stop layer of the periodic substructure preferably comprises undoped GaAs
and undoped AlAs, respectively. The undoped AlAs functions as an etch stop during
etching by a chlorine-based gas mixture that includes fluorine. The array of multi-wavelength
thyristor devices may be used to realize devices that provide a variety of optoelectronic
functions, such as an array of thyristor-based lasers that emit light at different
wavelengths and/or an array of thyristor-based detectors that detect light at different
wavelengths (e.g., for wavelength-division-multiplexing applications).