A multi-layered unit according to the present invention includes a support substrate
formed of platinum (Pt), a buffer layer formed on the support substrate and formed
of a dielectric material containing a bismuth layer structured compound having
an excellent orientation characteristic and a composition represented by Bi4Ti3O12
and oriented in the c axis direction, and a dielectric layer formed on the buffer
layer, formed of a dielectric material containing a bismuth layer structured compound
having an excellent characteristic as a capacitor material and a composition represented
by SrBi4T4O15 and containing the bismuth layer
structured compound oriented in the c axis direction. Since the thus constituted
multi-layered unit includes the dielectric layer containing the bismuth layer structured
compound oriented in the c axis direction, in the case of, for example, providing
an upper electrode on the dielectric layer to form a thin film capacitor and applying
a voltage between the support substrate serving as an electrode layer and the upper
electrode, the direction of the electric field substantially coincides with the
c axis of the bismuth layer structured compound contained in the dielectric layer.
As a result, since the ferroelectric property of the bismuth layer structured compound
contained in the dielectric layer can be suppressed and the paraelectric property
thereof can be fully exhibited, it is possible to fabricate a thin film capacitor
having a small size, large capacitance and an excellent dielectric characteristic.