An electron-emitting device including a protective layer that is formed on a
catalyst
layer to protect the catalyst layer from the deleterious environmental conditions
before or during a cathode process. The present invention further includes a half
etching process that is adapted to partially remove portions of the protective
layer from the catalyst layer to etch the catalyst layer except carbon nano-tube
growing portions. Portions of the protective layer still remain on the catalyst
layer to protect the catalyst layer from the deleterious conditions from next cathode
formation process.