In the present invention, there are provided self-assembled ZnO nanotips grown
on relatively low temperatures on various substrates by metalorganic chemical vapor
deposition (MOCVD). The ZnO nanotips are made at relatively low temperatures, giving
ZnO a unique advantage over other wide bandgap semiconductors such as GaN and SiC.
The nanotips have controlled uniform size, distribution and orientation. These
ZnO nanotips are of single crystal quality, show n-type conductivity and have good
optical properties. Selective growth of ZnO nanotips also has been realized on
patterned (100) silicon on r-sapphire (SOS), and amorphous SiO2 on r-sapphire
substrates. Self-assembled ZnO nanotips can also be selectively grown on patterned
layers or islands made of a semiconductor, an insulator or a metal deposited on
R-plane (01{overscore (1)}2) Al2O3 substrates as long as
the ZnO grows in a columnar stucture along the c-axis [0001] of ZnO on these materials.
Such self-assembled ZnO nanotips and nanotip arrays are promising for applications
in field emission displays and electron emission sources, photonic bandgap devices,
near-field microscopy, UV optoelectronics, and bio-chemical sensors.