A two sided wafer handling end-effector provides for the efficient loading and
unloading of wafers into and out of a wafer processing apparatus. Each side of
the end-effector includes spaced apart rotatable catch mechanisms between which
a wafer is firmly grasped. When the end-effector is positioned beneath the wafer
processing apparatus the catch mechanisms are rotated to an open position and a
lifting surface on the catch mechanisms lifts the wafer into the wafer processing
apparatus. When the catch mechanisms are in the open position the wafer is centered
on the end-effector by rotatable rocker assemblies that contact the edge of the
wafer. As the end-effector is raised into contact with the processing apparatus,
the rocker assemblies rotate to a lowered position in the end-effector while arcuate
surfaces on the assemblies maintain contact with the wafer edge.