A single-electron transistor using nanoparticles is provided. The single-electron
transistor includes a first insulating film, a gate electrode patterned in a stripe
form on the first insulating film, a second insulating film formed on exposed surfaces
of the first insulating film and the gate electrode in such a way that a stepped
portion is formed at a boundary between the gate electrode and the first insulating
film, first and second electrodes formed on the second insulating film in such
a way that a groove is formed at the stepped portion to expose a surface of the
second insulating film, the first and second electrodes being separated from each
other by the groove, and nanoparticles positioned at the groove and contacting
with the first and second electrodes, the nanoparticles being channels for electron
transfer. The single-electron transistor is manufactured using previously prepared
nanoparticles and a general semiconductor process, thereby enabling low cost, mass
production and operation at room temperature.