A magneto resistive memory device is fabricated by etching a blanket metal stack
comprised of a buffer layer, pinned magnetic layer, a tunnel barrier layer and
a free magnetic layer. The problem of junction shorting from resputtered metal
during the etching process is eliminated by formation of a protective spacer covering
the side of the freelayer and tunnel barrier interface. The spacer is formed following
the first etch through the free layer which stops on the barrier layer. After spacer
formation a second etch is made to isolate the device. The patterning of the device
tunnel junction is made using a disposable mandrel method that enables a self-aligned
contact to be made following the completion of the device patterning process.