A power device having vertical current flow through a semiconductor body of one
conductivity type from a top electrode to a bottom electrode includes at least
one gate electrode overlying a gate insulator on a first surface of the body, a
channel region of second conductivity type in the surface of the body underlying
all of the gate electrode, a first doped region of the second conductivity type
contiguous with the channel region and positioned deeper in the body than the channel
region and under a peripheral region of the gate electrode, and a second doped
source/drain region in the surface of the body abutting the channel region and
adjacent to the gate electrode. When the gate is forward biased, an inversion region
extends through the channel region and electrically connects the first electrode
and the second electrode with a small Vf near to the area between adjacent
P bodies being flooded with electrons and denuded of holes. Therefore, at any forward
bias this area conducts as an N-type region. When the gate electrode is reverse
biased, the long channel region underlying the full length of the gate electrode
reduces reverse leakage current.