A method and apparatus for maximizing passive voltage contrast on the surface
of
a die and then using the maximized passive voltage contrast to identify electrical
failures in the die. The method employs a primary electron beam to scan the surface
of the die. In response, secondary electrons are emitted from the die and then
captured by a secondary electron detector. The density of secondary electrons is
further modulated by a passive voltage near the die surface. To enhance the passive
voltage contrast on the die surface, the incident angle of the primary electron
beam is adjusted with respect to the die, the passive voltage contrast reaching
a maximum at an incident angle of about 75 or above. With such enhanced contrast,
an image depicting the magnitude of the secondary electron current can be used
to detect electrical failures in the die.