Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

 
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< Real-time imaging spectropolarimeter based on an optical modulator

< Apparatus and process for examining a surface

> Database interpolation method for optical measurement of diffractive microstructures

> Method and apparatus for imaging samples
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