A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled
to a rotating frame by a first torsional hinge along a rotational axis. The rotating
frame has a body that defines a frame opening, and a group of rotational teeth
extending from the body. A first bonding pad is located in the frame opening and
coupled to the rotating frame by a second torsional hinge along the rotational
axis. A second bonding pad is coupled to the rotating frame by a third torsional
hinge along the rotational axis.