A microvalve for controlling fluid flow, including a body portion having a plurality
of spaced openings formed therein, a shutter located adjacent to and substantially
parallel with the body portion having a plurality of spaced openings formed therein,
a drive mechanism for causing the shutter to move laterally with respect to the
body portion so that the spaced openings of the shutter are brought into and out
of alignment with the spaced openings of the body portion, wherein the microvalve
is in an open position and a closed position, respectively, and, a latching mechanism
for preventing the shutter from moving laterally with respect to the body portion.