The squareness of the both end surfaces of the flange portion with respect to the outer circumference of the shaft portion of the shaft member is set to 0.001 mm or less respectively, and the flatness of both end surfaces of the flange portion is set to 0.001 mm or less respectively. The squareness of the end surface of the bearing member with respect to the inner circumference of the bearing member is set to 0.002 mm or less, and the flatness thereof is set to 0.0015 mm or less. The flatness of the inner surface of the bottom portion of the housing is set to 0.002 mm or less.