To obtain a high intensity, high definition and sophisticated electrooptic display
device unit such as transmissive type LCD, a semi-transmissive type LCD, a reflective
type LCD, a surface emitter type organic EL, or an underside emitter type organic
EL, etc. which has high electron and positive hole mobility and low leak electric
current qualities.
A porous semiconductor layer (low porous Si layer 11a/high porous
Si layer 11b/low porous Si layer 11c), a monocrystalline
Si layer12a, and the Si O2 layer 13a are
formed on a monocrystalline Si substrate 10. The Si O2 layer
13a of the peripheral circuit area is removed, leaving the Si O2
layer 13a in the display area. The poly Si layer 14a
is formed in the display area by semiconductor epitaxial growth, and a monocrystalline
Si layer 12b is formed in the peripheral circuit area. Then, the
display element section is formed in the poly Si layer 14 of the display
area and the peripheral circuitry section is formed in the monocrystalline Si layer
12b of the peripheral circuit area. The assembly is divided into
each ultra slim electrooptic display device unit after separation from the backing,
and after the process of separating the Si substrate 10 from the porous
Si layer 11b and by attaching the backing to the ultra slim electrooptic
display element substrate after its separation. Each ultra slim electrooptic display
device unit is divided after attaching the backing.