The object of the present invention is to provide a method of producing low oxygen-containing potassium fluorotantalate crystals or low oxygen-containing potassium fluoroniobate crystals, the crystals obtained by the production method, and a method of analyzing oxygen contained in these crystals. The method of producing low oxygen-containing potassium fluorotantalate crystals comprises generating recrystallized potassium fluorotantalate crystals by controlled cooling of a saturated solution of potassium fluorotantalate containing hydrofluoric acid as an essential component, collecting the generated recrystallized crystals through filtration, and drying the collected recrystallized crystals in a drying apparatus so as to obtain the crystals, and the production method is characterized in that the saturated solution of potassium fluorotantalate containing hydrofluoric acid as an essential component contains hydrofluoric acid in a concentration of 0.5 mol/l to 10 mol/l.