A reflective liquid crystal display device has at least one anti-reflection layer
made of a metallic film and a silicon oxynitride film that exhibits low reflectivity
against light beams which may otherwise be incident into pixel switching transistors.
At least one pair of pixel switching transistor and a capacitor are formed on a
semiconductor substrate. The transistor and the capacitor are electrically isolated
from each other. A first interlayer insulating layer is formed on the transistor
and the capacitor. A wiring layer is formed on the first interlayer insulating
layer. A second interlayer insulating layer is formed over the wiring layer. A
light shielding layer is formed on the second interlayer insulating layer. A third
interlayer insulating layer is formed over the light shielding layer. At least
one pixel electrode is formed on the third interlayer insulating layer. A common
electrode is formed over the pixel electrode. A light-transmissive substrate is
formed on the common electrode. A liquid crystal layer is provided between the
pixel electrode and the common electrode. An anti-reflection layer is formed on,
at least, either the wiring layer or the light shielding layer. The anti-reflection
layer is a double layer of a metallic film and a silicon oxynitride film that exhibits
a refraction index different from a refraction index of the third interlayer insulating layer.