A method for plating copper conductors on an electronic substrate and devices
formed
are disclosed. In the method, an electroplating copper bath that is filled with
an electroplating solution kept at a temperature between about 0 C. and about
18 C. is first provided. A copper layer on the electronic substrate immersed
in the electroplating solution is then plated either in a single step or in a dual-step
deposition process. The dual-step deposition process is more suitable for depositing
copper conductors in features that have large aspect ratios, such as a via hole
in a dual damascene structure having an aspect ratio of diameter/depth of more
than or as high as 1/10. Various electroplating parameters are utilized
to provide a short resistance transient in either the single step deposition or
the dual-step deposition process. These parameters include the bath temperature,
the bath agitation, the additive concentration in the plating bath, the plating
current density utilized, the deposition rate of the copper film and the total
thickness of the copper film deposited.