A device for positioning disk-shaped objects (1) to inspect the front
and
rear sides of disk-shaped objects and to reduce the negative effect of large-area
contact between the holder and the disk-shaped object. The device comprises a rotatable
table (24) which can be adjusted in the x-y direction in an adjustment plane
and is intended to accomodate a platform (3). A fork-shaped frame (8)
is mounted on the platform so as to be rotatable about an axis of rotation which
is aligned perpendicular to the surface of the platform (3) and the angle
of tilt of which can be set relative to the adjustment plane. At its fork ends,
the fork-shaped frame (8) has another axis of rotation which is aligned
perpendicular to the axis of rotation of the fork-shaped frame (8) and about
which a frame-shaped object holder (9) is mounted so as to be rotatable
in the fork-shaped frame (8) for the purpose of turning the object. The
frame-shaped object holder (9), which carries the object in the edge region
of the latter, surrounds a center through which passes a pivoting axis aligned
parallel to the adjustment plane and intended for setting the angle of tilt of
the second axis of rotation relative to the adjustment plane. Devices of this kind
can be used to position flat objects in space for purposes of inspecting semiconductor
wafers or flat panels.