Present invention provides enabling methods of integrating novel nanotube
elements into semiconductor devices, such as transistor containing electronic device.
This is done in a series of process steps, which consist of attaching magnetic
nanoparticles to nanotubes, tailoring magnetic nanotubes of selected size (diameter
and length), filtration of nanotube to pre-determined sizes, preparing nanotube
precursor in aqueous chemicals to form colloidal solutions of proper concentration,
dispersing nanotube-containing solutions onto wafer surface, and finally positioning
nanotubes at desired locations by magnetically assisted assembly to complete nanotube
device structure. The key to this invention is to provide miniature nanotubes with
tangible physical properties, in this case, magnetic properties, so that they can
be aligned, filtered, and precisely directed to desired locations for device application.
Such processes enable nanotubes to be compatible with typical semiconductor wafer
processing technologies.