There is provided a transfer apparatus capable of increasing the length of
a transfer arm when it is extended, without increasing the size of the transfer
arm when it is contracted. The transfer apparatus 4 comprising a transfer
arm 17 which comprises: two rotating shafts 5 and 6 arranged
coaxially or in parallel; a pair of first arms 7 and 8, one end portions
of which are fixed to the rotating shafts 5 and 6, respectively;
a pair of second arms 10 and 11, one end portions of which are connected
to the other end portions of the pair of first arms 7 and 8 by means
of pins, respectively; and a holding portion 14 for holding an object w
to be processed, the holding portion 14 being connected to each of the other
end portions of the pair of second arms 10 and 11 by means of pins,
wherein the second arms 10 and 11 cross each other.