Mechanical control and actuation of an adaptive optical element provides
highly stable and repeatable correction of the shape of an optical element to an
accuracy of a small fraction of a very short wavelength of light, responsive to
a metrology source and sensor arrangement. Actuators in the form of individual
set-screws or other actuators capable of axially positioning a shaft are driven
by a robotic screw driver with four degrees of freedom or one or more linear actuators
to exert force on the mirror. Positive or negative force may be used for outward
and/or inward deflection of the mirror. When a desired force is developed on the
mirror through a mechanical linkage, the linkage may be clamped by a passive clamp
which may be released by an actuator such that the adjustment is maintained while
the linear actuator and the clamp actuator are turned off; yielding a highly stable
adjustment while effectively removing sources of actuator drift, noise, vibration
and heating which may adversely affect stability.