An X-ray optical system for small angle scattering has a parabolic multilayer
mirror and, so that switching to other X-ray incident optical systems for X-ray
analysis can be easily performed. A parabolic multilayer mirror, an optical-path
selecting slit device, a small-angle selecting slit device and a Soller slit are
arranged between an X-ray source and a specimen-side slit. An X-ray beam having
passed through the first aperture of an aperture slit plate is interrupted by the
optical-path selecting slit. An X-ray beam having passed through the second aperture
of the aperture slit plate is reflected at the reflecting surface of the multilayer
mirror to become a parallel beam. This parallel beam passes through an aperture
of the optical-path selecting slit device. The beam width is restricted by a narrow
slit of the small-angle selecting slit device.