A nitride-based laser diode structure utilizing a metal-oxide (e.g., Indium-Tin-Oxide
(ITO) or Zinc-Oxide (ZnO)) in place of p-doped AlGaN to form the upper cladding
layer. An InGaN laser diode structure utilizes ITO upper cladding structure, with
an SiO2 isolation structure formed on opposite sides of the ITO upper
cladding structure to provide a lateral index step that is large enough to enable
lateral single-mode operation. The lateral index step is further increased by slightly
etching the GaN:Mg waveguide layer below the SiO2 isolation structure.
An optional p-type current barrier layer (e.g., AlGaN:Mg having a thickness of
approximately 20 nm) is formed between the InGaN-MQW region and a p-GaN
upper waveguide layer to impede electron leakage from the InGaN-MQW region.