There is provided a surface emitting semiconductor laser satisfying a requirement
of making a transverse mode stable and having characteristics of high output power,
low resistance, high efficiency, and high speed response and a method for manufacturing
the surface emitting semiconductor laser.
Five holes are formed on the top surface of an upper multilayer reflection film
formed in the shape of a post by the use of a focused ion beam (FIB) processing
unit. One hole is formed on the surface of an upper multilayer reflection film
corresponding to the center position of a square current injection region which
is about 8 m square and the remaining four holes are formed at the corners
of the square current injection region, for example, at the positions about 2 m
square away from the one hole to produce four light emitting spots.