The method for determining local structures in optical materials, especially
crystals, includes observing schlieren visually in a material to be tested with
divergent white light in a first step; measuring birefringence of polarized laser
light in the material to determine local defects and structure faults in the material
with a spatial resolution of 0.5 mm or better in a second step if the material
is judged to be suitable in the first step and then interferometrically measuring
the material to determine the faults in the material by interferometry in a third
step if the material is judged to be suitable in the first and second steps. This
method can be part of a method for making optical components, especially for microlithography.