A stage system that can meet enlargement of a stroke and thus, particularly,
that
can be suitably incorporated into an electron beam exposure apparatus. The stage
system includes an X driving member (3) being movable along an X direction,
a Y driving member (2) being movable along a Y direction, an X-Y movable
member being movable in the Y direction relative to the X driving member, through
a Y lateral static-pressure bearing (44), and also being movable in the
X direction relative to the Y driving member through an X lateral static-pressure
bearing, wherein a fluid discharged from the X lateral static-pressure bearing
is combined with a fluid discharged from the Y lateral static-pressure bearing,
and wherein the combined fluid is discharged from a discharging bore (53")
formed in the X driving member.