An exemplary system and method for manufacturing micropump systems having integrated
piezoresistive sensors is disclosed as including inter alia: a substrate, an inlet
channel, an outlet channel, a pumping cavity, a first valve for permitting fluid
flow from the inlet channel to the pumping cavity and restricting backflow of purged
fluid from the pumping cavity to the inlet channel; a second valve for permitting
fluid flow from the pumping cavity to an outlet channel and restricting backflow
of purged fluid from the outlet channel to the pumping cavity; a pump actuator
element; a pressure sensing cavity surface capable of at least partial mechanical
deformation; a plurality of piezoresistors disposed within the sensing cavity;
a plurality of contact pads; a plurality of conductive pathways connecting the
piezoresistors and the contact pads; and a substantially monolithic device package,
wherein the sensing cavity is substantially contained within the micropump device
package. Disclosed features and specifications may be variously controlled, adapted
or otherwise optionally modified to improve micropump operation in any microfluidic
application. Exemplary embodiments of the present invention representatively provide
for piezoresistive pressure sensors that may be readily integrated with existing
portable ceramic technologies for the improvement of device package form factors,
weights and other manufacturing and/or device performance metrics.