The present invention relates to a transfer apparatus for a wafer, in which the
wafer may be transferred in a narrow space by reducing a transfer device footprint.
The transfer device has a base, a lower arm, an upper arm and a hand. The lower
arm is configured to be vertically adjustable and rotatable on a vertical axis.
The upper arm is pivotably coupled to the lower arm, and the hand is horizontally
coupled to the upper arm.