An anchor to hold getter materials in place within a micromechanical device package
substrate. First and second cavity faces define an anchor cavity and mechanically
retain a getter away from a region holding the micromechanical device. The getter
anchor may be formed in a substrate comprised of at least three layers. The layers
form a cavity in the substrate with a wide bottom portion—formed in the middle
layer and a relatively narrower top portion—formed by the top layer. The
narrow portion helps to retain the getter in the cavity by creating a mechanical
lock on the wide portion of getter in the bottom of the cavity.