A fluorine-containing cyclic ester is represented by the formula 1: ##STR1##

wherein each R¹ independently represents —H or —F, wherein R² is one selected from the group consisting of —H, —F, —CF₃, —OH, —COOH and —COOR⁴, where R⁴ is an alkyl group having a carbon atom number of 1-15, and wherein R³ is a substituent selected from the group consisting of —F, —CF₃, and —R⁵C(CF₃)₂OR⁶, where R⁵ is one selected from the group consisting of CH₂, C₂H₄, and OCH₂, and R⁶ is H or an acid-labile protecting group.