A pair of opposing thin plate sections, movable sections, and fixed sections
for
supporting the thin plate sections and the movable sections are provided on a ceramic
substrate. After a wiring pattern and a gap or an insulating layer of cermet layer
for filling the gap are formed on a ceramic substrate, these are sintered. After
that, piezoelectric/electrostrictive layers and cermet electrode layers including
a piezoelectric/electrostrictive material and a conductive material are alternately
stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive
device having the piezoelectric/electrostrictive element in multilayer structure
is obtained.