An array waveguide diffraction grating 201 as waveguide type optical device comprises a planar lightwave circuit 203 with an optical waveguide layer 211 formed on a silicon substrate 212 and having a predetermined thickness h₀, a first compensation substrate 204 bonded to the side of the optical waveguide layer 211 and having a thickness h₁ and a second compensation substrate 205 formed on the silicon substrate 212 and having a thickness h₄. The linear expansion coefficients ₁ and ₄ of the two compensation substrates 204 and 205 are set to be greater than that of the optical waveguide element 203, and highly rigid adhesives are used as a first and a second adhesive 214 and 215. It is thus possible to have the contraction of the optical waveguide element 203 due to a temperature change increased with the first and second substrates, thus permitting the center frequency setting to a desired value in a predetermined temperature range. Similar effects are obtainable by merely providing a support substrate on the substrate side of the optical waveguide element 203.