Structures and methods for NOR flash memory cells, arrays and systems
are provided. The NOR flash memory cell includes a vertical floating gate transistor
extending outwardly from a substrate. The floating gate transistor having a first
source/drain region, a second source/drain region, a channel region between the
first and the second source/drain regions, a floating gate separated from the channel
region by a gate insulator, and a control gate separated from the floating gate
by a gate dielectric. A sourceline is formed in a trench adjacent to the vertical
floating gate transistor and coupled to the first source/drain region. A transmission
line coupled to the second source/drain region. And, a wordline is coupled to the
control gate perpendicular to the sourceline.