A process and apparatus for the synthesis of metal oxide nanopowder from a metal
compound vapour is presented. In particular a process and apparatus for the synthesis
of TiO2 nanopowder from TiCl4 is disclosed. The metal compound
vapour is reacted with an oxidizing gas in electrically induced RF frequency plasma
thus forming a metal oxide vapour. The metal oxide vapour is rapidly cooled using
a highly turbulent gas quench zone which quickly halts the particle growth process,
yielding a substantial reduction in the size of metal oxide particles formed compared
with known processes. The metal compound vapour can also react with a doping agent
to create a doped metal oxide nanopowder. Additionally, a process and apparatus
for the inline synthesis of a coated metal oxide is disclosed wherein the metal
oxide particles are coated with a surface agent after being cooled in a highly
turbulent gas quench zone.