A method and apparatus providing a micro-mirror device configured to increase
actuation
speed thereof. The micro-mirror device includes a substrate, a mirror, a spring
member and at least one adjacent micro-mirror device. The mirror is suspended over
the substrate and configured to deflect in response to an actuation force. The
spring member is suspended between the substrate and the mirror. Further, the spring
member is configured to store energy upon being deflected by the mirror and is
configured to release the stored energy to force the mirror to another position.
The at least one adjacent micro-mirror device is positioned over the substrate
adjacent the mirror and is configured to suspend the spring member.