A magnetic random access memory device including a pinned layer having a diffusion
barrier, a sense layer, and a tunnel barrier to electrically couple the pinned
layer to the sense layer. A method for forming a magnetic random access memory
device including forming, on a substrate, a sense layer, forming a tunnel barrier
on the sense layer, forming a pinned layer on the tunnel barrier, where the pinned
layer includes a diffusion barrier to stop manganese atoms from diffusing to the
interface of the tunnel barrier, and annealing the substrate, the sense layer,
the tunnel barrier and the pinned layer. The diffusion barrier can include a native
oxide having a thickness up to about seven angstroms or an aluminum oxide having
a thickness up to about seven angstroms.