A laser microscope is provided, which is low in manufacturing costs and compact
in structure. A laser beam emitted from a semiconductor laser is converted into
a rectilinear light beam which has divergence in one direction by use of a micromirror
device. The micromirror device comprises a plurality of micromirrors arranged in
a two-dimensional array, and each micromirror is vibrated at a high speed by a
driving pulse. Since each micromirror is movably supported by a hinge, a mirror
layer of the micromirror is displaced in a curved manner by the electrostatic attractive
force caused by the driving pulse. By this curved displacement of the mirror layer,
each micromirror operates as a cylindrical mirror to convert an incident laser
beam into an incoherent light beam which diverges in one direction. The rectilinear
beam is projected to a sample through a beam deflection device and an objective
lens, and a reflected light from the sample is made incident on a linear image
sensor. Since the micromirror device is relatively low in costs and a relatively
large diverging angle is obtained, the laser microscope low in manufacturing costs
and compact in structure can be achieved.