A dense plasma focus radiation source for generating EUV radiation using Lithium
vapor and including a coaxially disposed anode and cathode. The invention includes
methods and apparatuses for enhancing the efficiency of EUV radiation production,
for protecting, cooling and extending the life of the anode and cathode, for protecting
and shielding collecting optics from debris and pressure disturbances in the discharge
chamber, and for feeding Lithium into the discharge chamber.