A semiconductor device includes a MOS transistor, interlayer dielectric film,
first
and second high-dielectric-constant films, and first and second conductive films.
The MOS transistor is formed on a semiconductor substrate. The interlayer dielectric
film is formed on the semiconductor substrate so as to cover the MOS transistor.
The first high-dielectric-constant film is formed on the interlayer dielectric
film and has an opening portion that reaches the interlayer dielectric film. The
first conductive film contains a metal element and is formed to be partially embedded
in the opening portion. The second high-dielectric-constant film is formed on the
first conductive film. The second conductive film is formed on the second high-dielectric-constant film.