Reactive sensors typically exhibit nonlinear response to temperature variation. Systems and methods are disclosed for compensating for the nonlinear and/or temperature dependent behavior of reactive sensors and for calibrating the post-compensation output signals relative to known samples of the physical parameter under measure. One call of embodiments includes a housing containing at least part of a reactive sensor, a monolithic integrated circuit and a timing reference. The integrated circuit includes a waveform generator for generating a sensor exciting signal, a detector for detecting the response of the sensor to the combination of the exciting signal and the under-measure physical parameter, a temperature compensating unit and the Pade Approximant nonlinearity compensating unit are tuned by use of digitally programmed coefficients. The coefficients calibrate the final output as well as compensating for nonlinearity and temperature sensitivity.