The conventional flash memory device is fabricated by the MOS processing technology
on a bulk substrate and has a similar configuration to an MOS device.
While the conventional CMOS device has a superior scaling down characteristic,
the scaling down characteristic of a flash memory device is poor due to the inability
to reduce the thickness below 7 nm or 8 nm for the tunneling oxide film where the
charges in the channel are tunneled into the floating electrode through the tunneling oxide.
In order to resolve this problem, the present invention, instead of a SOI wafer,
uses a cheaper bulk silicon wafer with lower defect density. A wall shape Fin active
region where the channel and the source/drain are formed is connected to the bulk
silicon substrate by which floating body effect and heat conduction problem are
resolved. a flash memory device is fabricated by forming a tunneling oxide film
on side surfaces of the Fin active and a floating (storage) electrode where the
charges could be stored.
The above structure has a superior scaling down characteristic and enhanced memory
performance due to a double-gate flash memory device structure.